AMES Delivered

The University of Manchester’s P-NAME facility has grown by two new implantation systems!

The first of the AMES systems was delivered to the University in June and is dedicated to low dose and deterministic implantation work. The second system, to be delivered in November 2026, will be dedicated to isotopic enrichment and alloy synthesis using ion-implantation. Just like P-NAME, both of the AMES systems have co-incident electron beams to locate regions of interest for implantation with high precision on devices without unnecessary ion implantation. This allows the ion implantation step to become part of the fabrication process-flow, with vacuum suitcase compatibility across all three systems allowing for high-quality implantation, even for environmentally sensitive materials.

All three systems will be used through the MEAD programme grant to engineer novel advanced devices.